From gsosa at snf.stanford.edu Tue Nov 8 15:38:16 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 8 Nov 2011 15:38:16 -0800 Subject: Comment svgcoat2 SNF 2011-11-08 15:38:15: 955-7 Thickness test 11/8 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 7071 Angstroms, Std Dev. 5 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From vilanova at snf.stanford.edu Wed Nov 9 09:05:17 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Nov 2011 09:05:17 -0800 Subject: Comment svgcoat2 SNF 2011-11-09 09:05:17: Cleaned Up HMDS hotplate and tested. Message-ID: From jparker at snf.stanford.edu Tue Nov 15 18:33:47 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 15 Nov 2011 18:33:47 -0800 Subject: Problem svgcoat2 SNF 2011-11-15 18:33:47: Hotplate belt in back frayed Message-ID: The belt for the hotplate closest to the back of the tool that moves wafers laterally has 1 spot that is 1/3-1/2 torn through and might need replacing. It doesn't seem to affect wafer transfer at the moment. From vilanova at snf.stanford.edu Wed Nov 16 07:43:47 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Nov 2011 07:43:47 -0800 Subject: Problem svgcoat2 SNF 2011-11-15 18:33:47: Hotplate belt in back frayed Message-ID: Replaced Post Bake Hotplate wafer transfer Belt and tested, Ok to use From gsosa at snf.stanford.edu Tue Nov 29 07:07:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:06 -0800 Subject: Comment svgcoat2 SNF 2010-08-20 12:08:14: 955 0.7 thickness 8/20 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:10 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:10 -0800 Subject: Comment svgcoat2 SNF 2010-09-03 10:52:53: 220-3 4 um Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:15 -0800 Subject: Comment svgcoat2 SNF 2010-09-15 11:40:23: 3612 looks good Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:19 -0800 Subject: Comment svgcoat2 SNF 2010-09-16 09:01:40: 955 0.7 thickness test -9/16 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:23 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:23 -0800 Subject: Comment svgcoat2 SNF 2010-09-17 16:39:30: 3612 Status 9/17 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:27 -0800 Subject: Comment svgcoat2 SNF 2010-09-21 15:12:41: 3612 Status 9/21 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:30 -0800 Subject: Comment svgcoat2 SNF 2010-10-01 10:07:07: 955 0.7 thickness test 10/1/10 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:34 -0800 Subject: Comment svgcoat2 SNF 2010-10-12 20:12:58: 1.6 w/o VP looks good Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:39 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:39 -0800 Subject: Comment svgcoat2 SNF 2010-10-18 10:20:34: cleanned dummies Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:44 -0800 Subject: Comment svgcoat2 SNF 2010-10-21 16:33:46: nonuniformities in the following recipes Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:48 -0800 Subject: Comment svgcoat2 SNF 2010-10-21 16:47:41: re: nonuniformities. Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:52 -0800 Subject: Comment svgcoat2 SNF 2010-11-02 08:29:43: 955 0.7um Thickness 11/2 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:07:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:07:56 -0800 Subject: Comment svgcoat2 SNF 2010-11-28 01:06:34: SPR220-3 seems okay Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:00 -0800 Subject: Comment svgcoat2 SNF 2010-12-10 10:46:17: 955 0.7 thickness test 12/10 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:04 -0800 Subject: Comment svgcoat2 SNF 2011-01-07 23:04:19: 3612 1um working fine Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:09 -0800 Subject: Comment svgcoat2 SNF 2011-01-19 11:35:30: cleaned all the dummies. Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:13 -0800 Subject: Comment svgcoat2 SNF 2011-01-21 11:09:10: Zpatel is running 3612 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:17 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:17 -0800 Subject: Comment svgcoat2 SNF 2011-03-02 10:14:08: Tool Status 3/2 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:21 -0800 Subject: Comment svgcoat2 SNF 2011-04-20 08:28:39: coral disable bug comment Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:25 -0800 Subject: Comment svgcoat2 SNF 2011-05-05 14:51:12: 955 0.7 thickness test 5/5 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:30 -0800 Subject: Comment svgcoat2 SNF 2011-05-23 09:33:30: 955 0.7 Thickness 5/23 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:35 -0800 Subject: Comment svgcoat2 SNF 2011-05-24 17:37:08: thickness and uniformity test Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:39 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:39 -0800 Subject: Comment svgcoat2 SNF 2011-06-06 08:04:34: FOund The system Powered Off Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:44 -0800 Subject: Comment svgcoat2 SNF 2011-06-06 08:33:53: System tested and cleaned . Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:48 -0800 Subject: Comment svgcoat2 SNF 2011-06-10 09:58:02: Cleaned! :-) Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:52 -0800 Subject: Comment svgcoat2 SNF 2011-06-17 09:18:06: Replaced Spinner Carriage Belts Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:08:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:08:56 -0800 Subject: Comment svgcoat2 SNF 2011-07-07 09:19:34: 955-0.7 Thickness Test 7/7 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:00 -0800 Subject: Comment svgcoat2 SNF 2011-07-14 08:43:47: Cleaned Up HMDS Plate ...... Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:04 -0800 Subject: Comment svgcoat2 SNF 2011-07-28 08:48:07: CLEANED CATCH CUP HOTPLATE AND CHUCK , CLEANED DUMMY WAFERS Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:09 -0800 Subject: Comment svgcoat2 SNF 2011-08-09 09:25:33: cleaned catch cup wafers hotplate chucks and belts Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:12 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:12 -0800 Subject: Comment svgcoat2 SNF 2011-08-31 09:20:58: Disp1 bubble Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:17 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:17 -0800 Subject: Comment svgcoat2 SNF 2011-09-08 16:40:34: 3612 1 um and 1.6um Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:21 -0800 Subject: Comment svgcoat2 SNF 2011-09-08 16:51:31: 955 0.7um Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:26 -0800 Subject: Comment svgcoat2 SNF 2011-09-08 16:53:35: 3617m 1.2um Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:29 -0800 Subject: Comment svgcoat2 SNF 2011-09-08 17:47:43: 3612 1um Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:40 -0800 Subject: Comment svgcoat2 SNF 2011-10-05 08:31:28: Found Dummy dirty contaminated wafer In Catch cup Bowl!!! Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:44 -0800 Subject: Comment svgcoat2 SNF 2011-10-11 08:15:06: Found The system Powered Off. Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:51 -0800 Subject: Comment svgcoat2 SNF 2011-10-17 09:29:27: cleaned up dummy wafers catch cup belts, hotplate and cool station, Cycled all dummies , All operations ok, Good to use. Message-ID: To Archives From gsosa at snf.stanford.edu Tue Nov 29 07:09:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:09:56 -0800 Subject: Comment svgcoat2 SNF 2011-10-24 08:06:06: cleaned stations , Hotplate chuck belts Message-ID: To Archives