Comment svgcoat2 SNF 2011-11-08 15:38:15: 955-7 Thickness test 11/8

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Nov 8 15:38:16 PST 2011


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 7071  Angstroms, Std Dev. 5 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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