Problem svgcoat2 SNF 2011-11-15 18:33:47: Hotplate belt in back frayed

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Nov 15 18:33:47 PST 2011


The belt for the hotplate closest to the back of the tool that moves wafers laterally has 1 spot that is 1/3-1/2 torn through and might need replacing. It doesn't seem to affect wafer transfer at the moment.




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