Comment svgcoat2 SNF 2011-10-11 08:15:06: Found The system Powered Off.
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Nov 29 07:09:44 PST 2011
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Comment svgcoat2 SNF 2011-10-05 08:31:28: Found Dummy dirty contaminated wafer In Catch cup Bowl!!!
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Comment svgcoat2 SNF 2011-10-17 09:29:27: cleaned up dummy wafers catch cup belts, hotplate and cool station, Cycled all dummies , All operations ok, Good to use.
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Comment svgcoat2 SNF 2011-10-05 08:31:28: Found Dummy dirty contaminated wafer In Catch cup Bowl!!!
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Comment svgcoat2 SNF 2011-10-17 09:29:27: cleaned up dummy wafers catch cup belts, hotplate and cool station, Cycled all dummies , All operations ok, Good to use.
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