Problem svgcoat2 SNF 2011-10-02 18:48:28: vapor prime lid occasionally dropping

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sun Oct 2 18:48:28 PDT 2011


track alarmed while trying to send the wafer because the vapor prime lid had tilted free and was blocking the track from closing.  after lifting it everything ran fine.  it looks like the spacer bar on the lid is popping up and allowing it to hinge freely.  I tried pushing it back down, but it did it again a few wafers later.  seems to work fine once fixing it.  




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