Problem svgcoat2 SNF 2011-10-02 18:48:28: vapor prime lid occasionally dropping

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 3 07:58:18 PDT 2011


Couple Of the Lid Screws Were Lose, Adjusted Screws And Run All 
Dummy wafers, All Operations Are Ok, Ready to use., 




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