Problem svgcoat2 SNF 2011-10-06 03:29:44: Transport problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Oct 6 07:57:23 PDT 2011


Found The system With all the " transfer stop" Lights ON maybe the 
wafers were PIcked up before they reached the receiving cassette,
I  Pressed "TRACK RESET" and Cycled all the dummy wafers, All 
operations Are Ok , Cleaned dummy wafers , Ok to use. 




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