Problem svgcoat2 SNF 2011-10-19 14:08:39: track vacuum break error message
ehe at snf.stanford.edu
ehe at snf.stanford.edu
Wed Oct 19 14:08:40 PDT 2011
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Comment svgcoat2 SNF 2011-10-17 09:29:27: cleaned up dummy wafers catch cup belts, hotplate and cool station, Cycled all dummies , All operations ok, Good to use.
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Problem svgcoat2 SNF 2011-10-19 14:08:39: track vacuum break error message
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Comment svgcoat2 SNF 2011-10-17 09:29:27: cleaned up dummy wafers catch cup belts, hotplate and cool station, Cycled all dummies , All operations ok, Good to use.
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Problem svgcoat2 SNF 2011-10-19 14:08:39: track vacuum break error message
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