Shutdown svgcoat2 SNF 2011-10-19 14:20:53: not working, not sending, track vacuum break

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Oct 19 14:59:59 PDT 2011


Computer Froze, Re Initialized Cumputer and cycled wafers, Ran 
Recipe # 7 , Everything Ok, all Operations ok, Ready to use. 




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