From gsosa at snf.stanford.edu  Wed Sep  7 07:12:51 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 7 Sep 2011 07:12:51 -0700
Subject: Shutdown svgcoat2 SNF 2011-09-07 07:12:50: Scheduled Shutdown
Message-ID: <mailman.1241.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

System Shutdown. Solvent exhaust upgrade in progress.



From mahnaz at snf.stanford.edu  Thu Sep  8 16:40:11 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 8 Sep 2011 16:40:11 -0700
Subject: Shutdown svgcoat2 SNF 2011-09-07 07:12:50: Scheduled Shutdown
Message-ID: <mailman.1242.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

ran wafers for 3612, 955 and 3617m.
Uli is entering the readings as comments.
litho team



From uli at snf.stanford.edu  Thu Sep  8 16:40:35 2011
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 8 Sep 2011 16:40:35 -0700
Subject: Comment svgcoat2 SNF 2011-09-08 16:40:34: 3612 1 um and 1.6um
Message-ID: <mailman.1243.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

3612 1um
top 17010A
center 16878A
bottom 16985A
left 17045A
right 17014A
3612 1.6 um
top 17010A
center 16878A
bottom 16985A
left 17045A
right 17014A



From uli at snf.stanford.edu  Thu Sep  8 16:51:32 2011
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 8 Sep 2011 16:51:32 -0700
Subject: Comment svgcoat2 SNF 2011-09-08 16:51:31: 955 0.7um
Message-ID: <mailman.1244.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

top 6974A
center 6947A
bottom 6981A
left 6983A
right 6981A



From uli at snf.stanford.edu  Thu Sep  8 16:53:35 2011
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 8 Sep 2011 16:53:35 -0700
Subject: Comment svgcoat2 SNF 2011-09-08 16:53:35: 3617m 1.2um
Message-ID: <mailman.1245.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

top 12477A
center 12357A
bottom 12417A
left 12455A
right 12476A



From uli at snf.stanford.edu  Thu Sep  8 17:47:43 2011
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 8 Sep 2011 17:47:43 -0700
Subject: Comment svgcoat2 SNF 2011-09-08 17:47:43: 3612 1um
Message-ID: <mailman.1246.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

top 10182A
center 10094A
bottom 10168A
left 10173A
right 10174A



From king at snf.stanford.edu  Fri Sep  9 19:39:50 2011
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Fri, 9 Sep 2011 19:39:50 -0700
Subject: Comment svgcoat2 SNF 2011-09-09 19:39:50: SVG2 software hung up
Message-ID: <mailman.1247.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

Keeps saying busy.  Track 1 was fine.



From vilanova at snf.stanford.edu  Mon Sep 12 08:18:52 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 12 Sep 2011 08:18:52 -0700
Subject: Comment svgcoat2 SNF 2011-09-09 19:39:50: SVG2 software hung up
Message-ID: <mailman.1248.1356283440.4703.svgcoat2-pcs@snf.stanford.edu>

System tested Ok, Cycled many wafers ,Couldnt repeat the user 
problem, Ok to use.