From wslee at snf.stanford.edu Fri Apr 13 06:41:58 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 13 Apr 2012 06:41:58 -0700 Subject: Comment svgcoat2 SNF 2012-04-13 06:41:57: coat track had lost wafer in vapor prime stage Message-ID: When I arrived, the tool had 2 wafers in the sender cassette and the transfer stage between the vapor prime and coater was spinning. I reset the track and it still wouldn't work. On further inspection, there was a wafer in the vapor primer that I had to fish out with my tweezers. Users should report a problem if they cannot get their wafers out of the tool. From vilanova at snf.stanford.edu Fri Apr 13 08:11:55 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 Apr 2012 08:11:55 -0700 Subject: Comment svgcoat2 SNF 2012-04-13 06:41:57: coat track had lost wafer in vapor prime stage Message-ID: Cycled System , Ran 6 wafers Each Through Vapor Prime Twice Couldnt Repeat the Problem , Vapor Prime Station Working Good. ok To use.