Comment svgcoat2 SNF 2012-04-13 06:41:57: coat track had lost wafer in vapor prime stage

wslee at snf.stanford.edu wslee at snf.stanford.edu
Fri Apr 13 06:41:58 PDT 2012


When I arrived, the tool had 2 wafers in the sender cassette and the transfer stage between the vapor prime and coater was spinning. I reset the track and it still wouldn't work. On further inspection, there was a wafer in the vapor primer that I had to fish out with my tweezers. Users should report a problem if they cannot get their wafers out of the tool.




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