Comment svgcoat2 SNF 2012-04-13 06:41:57: coat track had lost wafer in vapor prime stage

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Apr 13 08:11:55 PDT 2012


Cycled System , Ran 6 wafers Each  Through Vapor Prime Twice
Couldnt Repeat the Problem , Vapor Prime Station Working Good. 
ok To use. 




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