Problem svgcoat2 SNF 2012-08-03 13:12:31: Long Beeps while dispensing 3612 on Track 2

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Aug 3 13:54:51 PDT 2012


I've notice that the dispense hose coming out of the bottle was almost
out, this creates a bubble in the line , I pushed it back in, purged line,
 cleaned dummy wafers and catch cup chuck and belts, Cycled 10 wafers Using the same recipe the User had problems with, everything Ok
no bubbles dispensing good, Uniformity Good, Ok to use. 




More information about the svgcoat2-pcs mailing list