From vrinda at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vrinda at snf.stanford.edu (vrinda at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-08-08 13:10:41: receiver station cassette Message-ID: <25088395.77.1344456641813.JavaMail.coral@shine> The receiver station cassette on the track 2 was making a jarring sound on going down. This didn't happen when I tried to run the dummy wafers. Not sure why this is happeneing. The next user seems to have similar issues. From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-08-08 13:10:41: receiver station cassette Message-ID: <18545273.82.1344519245373.JavaMail.coral@shine> Is Not the Receiver Station is the cassette, If the cassette doesnt sit flat Onver the receiver or Send Indexer it will make a noise In the coat track or Developer, Just change the cassette and the noise will go away. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-08-09 15:01:03: Thickness Tests Message-ID: <31437966.104.1344549663661.JavaMail.coral@shine> 3612 1.0 um- Mean: 10297 A, Std Dev.: 12 A 3612 1.6 um- Mean: 17197 A, Std Dev: 19 A 955-7 0.7 um- Mean: 7213 A, Std.Dev.: 9A From xuanwu at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-08-10 00:00:24: wafers found on track Message-ID: <14013627.119.1344582025352.JavaMail.coral@shine> Previous user left wafers on track and alarm was going off (something about spindle top?). I turned off the alarm, but left the wafers on the track. From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-08-10 00:00:24: wafers found on track Message-ID: <33044433.122.1344612205678.JavaMail.coral@shine> Wafers Left On the track Were Dummy wafers, Removed Dummy wafers, Initialized System and Cycled Dummy wafers, Cleaned Hotplate Catch cup Dummy wafers Chuck And Belts , Cycled a batch of 8 wafers, all Operations Ok, Good to use. From faridz at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-13 16:37:57: spin coater not sensing wafers. Message-ID: <19216541.158.1347579477767.JavaMail.coral@shine> From ysyang88 at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: ysyang88 at snf.stanford.edu (ysyang88 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-13 21:05:59: Message-ID: <2100172.163.1347595559582.JavaMail.coral@shine> From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-09-14 08:22:38: Spindle Air Cylinder Failure Message-ID: <10887413.1.1347636158442.JavaMail.coral@shine> Spindle Air Cylider Problem, We Are Working On it, Stay Tuned.l...... From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-09-14 08:22:38: Spindle Air Cylinder Failure Message-ID: <6200884.7.1347650360334.JavaMail.coral@shine> Replaced Broken Air Spindle chuck Cylinder and tested, Cycled Wafers All operations are Ok, Ready to use. From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-13 21:05:59: Message-ID: <32846040.8.1347650366343.JavaMail.coral@shine> Replaced Broken Air Spindle chuck Cylinder and tested, Cycled Wafers All operations are Ok, Ready to use. From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-13 16:37:57: spin coater not sensing wafers. Message-ID: <9751522.9.1347650374351.JavaMail.coral@shine> Replaced Broken Air Spindle chuck Cylinder and tested, Cycled Wafers All operations are Ok, Ready to use. From zzp at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-22 00:11:10: chuck lost vaccum a few times Message-ID: <22467585.25.1348297871447.JavaMail.coral@shine> From cachang at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-22 16:47:03: vaccum problem Message-ID: <26519787.1.1348357623427.JavaMail.coral@shine> chuck lost vaccum, and the dummy wafer broke. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-22 00:11:10: chuck lost vaccum a few times Message-ID: <15627394.17.1348506103932.JavaMail.coral@shine> Chuck not coming up high enough to properly transfer wafer to chuck, causing mis-centered wafers. Checked and adjusted chuck to position height for proper chuck to belt clearance. Checked top/mid and bottom positions and sensors-OK. Checked and adjusted chuck mid position speed controller. Tested operation- All Ok. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-09-22 16:47:03: vaccum problem Message-ID: <5931590.18.1348506129182.JavaMail.coral@shine> Chuck not coming up high enough to properly transfer wafer to chuck, causing mis-centered wafers. Checked and adjusted chuck to position height for proper chuck to belt clearance. Checked top/mid and bottom positions and sensors-OK. Checked and adjusted chuck mid position speed controller. Tested operation- All Ok. From mahnaz at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-09-28 15:34:02: 3612, 1.6 um checked Message-ID: <12152961.103.1348871642906.JavaMail.coral@shine> 16995, 17033, 17026, 17011,17009um From mahnaz at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-10-05 09:40:49: receiver is noisy and shaking Message-ID: <11414886.6.1349455250173.JavaMail.coral@shine> Very unstable. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-10-05 09:56:05: computer problem Message-ID: <26675601.8.1349456166019.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-10-05 09:40:49: receiver is noisy and shaking Message-ID: <23911352.12.1349459182692.JavaMail.coral@shine> Cleaned and lubricated elevator lead screw. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-10-05 09:56:05: computer problem Message-ID: <10730286.13.1349459340175.JavaMail.coral@shine> Power on light was flashing amber color. Troubleshot and replaced the main power cord. Tested track- OK From lindaohara at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-10-10 10:42:00: Card error Message-ID: <32376284.48.1349890920781.JavaMail.coral@shine> Card error popped on screen and computer won't come back on. From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-10-10 10:42:00: Card error Message-ID: <33512812.49.1349892581962.JavaMail.coral@shine> Re Initalized Pc, And Cycled Wafers, Ok to use From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-10-16 09:38:19: Replaced power supply Message-ID: <28978158.41.1350405500274.JavaMail.coral@shine> Fan on the computer power supply not working causing track problems. Replaced the power supply. Verified that cooling fan works. Track tested OK. From cfchiang at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-10-16 12:42:01: vacuum issue Message-ID: <6351881.45.1350416522163.JavaMail.coral@shine> wafer can't be vacuumed in the spin coater stage From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-10-16 12:42:01: vacuum issue Message-ID: <30673998.9.1350508549742.JavaMail.coral@shine> Replaced the spindle position air cylinder. Tested track operation. All OK. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-10-19 09:28:03: 955-7 0.7um Tox 10/19 Message-ID: <25436772.54.1350664083928.JavaMail.coral@shine> Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 7143 Angstroms, Std Dev. 3 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From vilanova at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-10-26 14:05:28: Broken Wafer Message-ID: <1059760.143.1351285529191.JavaMail.coral@shine> There was a broken wafer Inside the catch cup, I removed it cleaned the catch cup chuck belts and dummy wafers. Ran System Ok to use From sclaussen at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-11-06 18:07:40: Vapor prime may not be working? Message-ID: <33175642.35.1352254061468.JavaMail.coral@shine> I used Recipe 7 W/ VP 2 MM EBR, and after the wafers came off the track, put them in the SRD. Patches of the resist flaked off. I repeated it (after stripping the resist) and it happened again. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-11-06 18:07:40: Vapor prime may not be working? Message-ID: <22855989.5.1352305889659.JavaMail.coral@shine> Checked the canister level-OK.. Checked the process program-OK. Checked the contact angle-OK. Fully tested track operation. From sclaussen at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-11-08 12:57:32: LOST WAFER on spin coater! Message-ID: <537479.42.1352408253128.JavaMail.coral@shine> Make sure you end with all the wafers you started with! This could effect other people's spins. From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-12-07 09:42:43: Installing badger Message-ID: <22559484.21.1354902163536.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Shutdown svgcoat2 SNF 2012-12-07 09:42:43: Installing badger Message-ID: <19514437.2.1354907261410.JavaMail.coral@shine> Installed and tested Badger. All OK From gsosa at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Comment svgcoat2 SNF 2012-12-07 11:08:00: Installed Badger 12/7 Message-ID: <29913235.3.1354907280607.JavaMail.coral@shine> Installed and tested Badger. All OK From edfei at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-12-10 16:08:33: Track non-responsive Message-ID: <8586788.18.1355184513705.JavaMail.coral@shine> Track became non-responsive after a wafer was stuck on the track. Wafer is now removed, but the track is still non-responsive From uli at snf.stanford.edu Sun Dec 23 09:23:50 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:50 -0000 Subject: Problem svgcoat2 SNF 2012-12-10 16:08:33: Track non-responsive Message-ID: <2527489.23.1355187621826.JavaMail.coral@shine> track reset. run test wafers, ok now.