Problem svgcoat2 SNF 2012-08-10 00:00:24: wafers found on track

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012


Wafers Left On the track Were Dummy wafers, Removed Dummy
 wafers, Initialized System and Cycled Dummy wafers, Cleaned
 Hotplate Catch cup Dummy wafers Chuck And Belts , Cycled a batch of 8 wafers, all Operations Ok, Good to use. 



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