Shutdown svgcoat2 SNF 2012-09-14 08:22:38: Spindle Air Cylinder Failure

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012


Replaced Broken Air Spindle chuck Cylinder and tested, Cycled Wafers
All operations are Ok, Ready to use. 



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