Problem svgcoat2 SNF 2012-09-13 16:37:57: spin coater not sensing wafers.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012

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Replaced Broken Air Spindle chuck Cylinder and tested, Cycled Wafers
All operations are Ok, Ready to use.

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