Problem svgcoat2 SNF 2012-09-22 16:47:03: vaccum problem
cachang at snf.stanford.edu
cachang at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012
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Problem svgcoat2 SNF 2012-09-22 00:11:10: chuck lost vaccum a few times
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Problem svgcoat2 SNF 2012-09-22 16:47:03: vaccum problem
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chuck lost vaccum, and the dummy wafer broke.
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Problem svgcoat2 SNF 2012-09-22 00:11:10: chuck lost vaccum a few times
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Problem svgcoat2 SNF 2012-09-22 16:47:03: vaccum problem
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