Problem svgcoat2 SNF 2012-09-22 00:11:10: chuck lost vaccum a few times

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012


Chuck not coming up high enough to properly transfer wafer to chuck, causing mis-centered wafers. Checked and adjusted chuck to position height for proper chuck to belt clearance. Checked top/mid and bottom positions and sensors-OK. Checked and adjusted chuck mid position speed controller. Tested operation- All Ok.



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