Problem svgcoat2 SNF 2012-09-22 16:47:03: vaccum problem

[gsosa at snf.stanford.edu]

Chuck not coming up high enough to properly transfer wafer to chuck, causing mis-centered wafers. Checked and adjusted chuck to position height for proper chuck to belt clearance. Checked top/mid and bottom positions and sensors-OK. Checked and adjusted chuck mid position speed controller. Tested operation- All Ok.