Problem svgcoat2 SNF 2012-10-16 12:42:01: vacuum issue
cfchiang at snf.stanford.edu
cfchiang at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012
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Comment svgcoat2 SNF 2012-10-16 09:38:19: Replaced power supply
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Problem svgcoat2 SNF 2012-10-16 12:42:01: vacuum issue
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wafer can't be vacuumed in the spin coater stage
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Comment svgcoat2 SNF 2012-10-16 09:38:19: Replaced power supply
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Problem svgcoat2 SNF 2012-10-16 12:42:01: vacuum issue
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