Comment svgcoat2 SNF 2012-10-19 09:28:03: 955-7 0.7um Tox 10/19

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 7143  Angstroms, Std Dev. 3 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.



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