Comment svgcoat2 SNF 2012-10-26 14:05:28: Broken Wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012


There was a broken wafer Inside the catch cup, I removed it cleaned
the catch cup chuck belts and dummy wafers. Ran System 
Ok to use



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