Problem svgcoat2 SNF 2012-11-06 18:07:40: Vapor prime may not be working?

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Sun Dec 23 09:23:50 PST 2012


I used Recipe 7 W/ VP 2 MM EBR, and after the wafers came off the track, put them in the SRD. Patches of the resist flaked off. I repeated it (after stripping the resist) and it happened again.



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