From gsosa at snf.stanford.edu Tue Feb 14 15:46:38 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:46:38 -0800 Subject: Shutdown svgcoat2 SNF 2011-12-13 13:01:21: Shutdown for Renovation Message-ID: Re-installed tracks. Complete wipedown of system. FLushed dispense lines and purged in resist and EBR. Verified hotplate temperature- OK.Verified resist thickness for 3612 1.0 and 1.6 micron and 955-7 0.7micron. 3617m not tested yet. 3612 1.0 micron result- Mean: 10451 A, Std Dev: 25 A. 3612 1.6 micron result- Mean: 17236 A, Std Dev: 6 A. 955-7 0.7 micron result- 7165 A, Std Dev: 14 A. From gsosa at snf.stanford.edu Tue Feb 14 15:47:26 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:47:26 -0800 Subject: Problem svgcoat2 SNF 2012-02-14 15:47:25: Track Update 2/14 Message-ID: Re-installed tracks. Complete wipedown of system. FLushed dispense lines and purged in resist and EBR. Verified hotplate temperature- OK.Verified resist thickness for 3612 1.0 and 1.6 micron and 955-7 0.7micron. 3617m not tested yet. 3612 1.0 micron result- Mean: 10451 A, Std Dev: 25 A. 3612 1.6 micron result- Mean: 17236 A, Std Dev: 6 A. 955-7 0.7 micron result- 7165 A, Std Dev: 14 A. From mahnaz at snf.stanford.edu Thu Feb 16 15:35:41 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 16 Feb 2012 15:35:41 -0800 Subject: Problem svgcoat2 SNF 2012-02-14 15:47:25: Track Update 2/14 Message-ID: Tested the 3617m ran the program for 1.26 um and the thickness are 12597,12599,12548,12587,12598 Happy processing From maxms at snf.stanford.edu Sun Feb 26 21:21:55 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 26 Feb 2012 21:21:55 -0800 Subject: Problem svgcoat2 SNF 2012-02-26 21:21:55: wafer not centered Message-ID: ran two wafers... both were not centered on the spinner, probably off by more than 5mm judging by EBR. From gsosa at snf.stanford.edu Mon Feb 27 09:47:05 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Feb 2012 09:47:05 -0800 Subject: Problem svgcoat2 SNF 2012-02-26 21:21:55: wafer not centered Message-ID: Checked and determined that chuck top position not high enough causing an intermittant mis-position of wafers. Adjusted chuck top position for proper clearance between wafer and transfer belts. Tested several times with very consistent results. Wafer centering looks good.