Problem svgcoat2 SNF 2012-02-14 15:47:25: Track Update 2/14

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Feb 14 15:47:26 PST 2012


Re-installed tracks. Complete wipedown of system. FLushed dispense lines and purged in resist and EBR. Verified hotplate temperature- OK.Verified resist thickness for 3612 1.0 and 1.6 micron and 955-7 0.7micron. 3617m not tested yet. 3612 1.0 micron result- Mean: 10451 A, Std Dev: 25 A. 3612 1.6 micron result- Mean: 17236 A, Std Dev: 6 A. 955-7 0.7 micron result- 7165 A, Std Dev: 14 A.




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