Problem svgcoat2 SNF 2012-02-26 21:21:55: wafer not centered

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Feb 27 09:47:05 PST 2012


Checked and determined that chuck top position not high enough causing an intermittant mis-position of wafers. Adjusted chuck top position for proper clearance between wafer and transfer belts. Tested several times with very consistent results. Wafer centering looks good.




More information about the svgcoat2-pcs mailing list