Problem svgcoat2 SNF 2012-02-26 21:21:55: wafer not centered

gsosa at gsosa at
Mon Feb 27 09:47:05 PST 2012

Checked and determined that chuck top position not high enough causing an intermittant mis-position of wafers. Adjusted chuck top position for proper clearance between wafer and transfer belts. Tested several times with very consistent results. Wafer centering looks good.

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