From ludwig at snf.stanford.edu Tue Jul 3 18:59:21 2012 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Tue, 3 Jul 2012 18:59:21 -0700 Subject: Problem svgcoat2 SNF 2012-07-03 18:59:21: EBR is flowing on top of the wafers Message-ID: at high pressure, just like a fountain From vilanova at snf.stanford.edu Thu Jul 5 08:11:27 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jul 2012 08:11:27 -0700 Subject: Problem svgcoat2 SNF 2012-07-03 18:59:21: EBR is flowing on top of the wafers Message-ID: Ran Different Recipes and I couldnt Repeat the EBR Error, Maybe someone was trying to change something and left The system confuse, this is why is good to check your recipe before you run your wafers, Tested Ok and Ready to use,. From clee58 at snf.stanford.edu Thu Jul 5 13:02:12 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Thu, 5 Jul 2012 13:02:12 -0700 Subject: Problem svgcoat2 SNF 2012-07-05 13:02:12: spinning never stop Message-ID: the spinner is never stop. it is spinning now and cant stop it. The remaining time for the spin is not reducing. From vilanova at snf.stanford.edu Thu Jul 5 13:34:54 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jul 2012 13:34:54 -0700 Subject: Problem svgcoat2 SNF 2012-07-05 13:02:12: spinning never stop Message-ID: Previous wafer got removed from the track, system was waiting for next wafer to go Fromn the chill plate to the Coat Chuck , Manually removed the dummy wafer , Initialized system , started same recipe (Clee58) was using , System back to normal, Ok to use. From yiwu at snf.stanford.edu Tue Jul 10 12:44:29 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Tue, 10 Jul 2012 12:44:29 -0700 Subject: Problem svgcoat2 SNF 2012-07-10 12:44:28: vapor prime temperature out of range Message-ID: discontinue my process. From gsosa at snf.stanford.edu Tue Jul 10 13:20:54 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 13:20:54 -0700 Subject: Shutdown svgcoat2 SNF 2012-07-10 13:20:53: B/S EBR problem Message-ID: From gsosa at snf.stanford.edu Tue Jul 10 16:04:04 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 16:04:04 -0700 Subject: Shutdown svgcoat2 SNF 2012-07-10 13:20:53: B/S EBR problem Message-ID: Replaced air-op valve for bottom EBR. Verified operation with glass wafer . All OK. From gsosa at snf.stanford.edu Tue Jul 10 16:40:10 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 16:40:10 -0700 Subject: Comment svgcoat2 SNF 2012-07-10 16:40:09: Vapor prime down Message-ID: Do not run programs with vapor prime. There is a problem with the temperature control. Please use the YES oven to prime your wafers. From gsosa at snf.stanford.edu Wed Jul 11 13:44:03 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Jul 2012 13:44:03 -0700 Subject: Problem svgcoat2 SNF 2012-07-10 12:44:28: vapor prime temperature out of range Message-ID: Secured the RTD probe to frame to prevent movement. Reseated connectors. Checked temperature with probe. All OK. From gsosa at snf.stanford.edu Wed Jul 11 13:44:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Jul 2012 13:44:07 -0700 Subject: Comment svgcoat2 SNF 2012-07-10 16:40:09: Vapor prime down Message-ID: Secured the RTD probe to frame to prevent movement. Reseated connectors. Checked temperature with probe. All OK. From kcbalram at snf.stanford.edu Tue Jul 24 12:56:56 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Tue, 24 Jul 2012 12:56:56 -0700 Subject: Problem svgcoat2 SNF 2012-07-24 12:56:56: Getting a resist streak on wafer Message-ID: Used recipe 1.6 um VP with EBR From vilanova at snf.stanford.edu Tue Jul 24 13:33:37 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 24 Jul 2012 13:33:37 -0700 Subject: Problem svgcoat2 SNF 2012-07-24 12:56:56: Getting a resist streak on wafer Message-ID: Cleaned Dummy wafers and Cycled Wafers ( 8 Total ) Cleaned Dispense hose, Resist Bottle is full , No bubbles, Uniformity On all my wafers Sre Ok, Ready To use.