Problem svgcoat2 SNF 2012-07-03 18:59:21: EBR is flowing on top of the wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 5 08:11:27 PDT 2012


Ran Different Recipes and I couldnt Repeat the EBR Error,
Maybe someone was trying to change something and
left  The system confuse, this is why is good to 
check your recipe before you run your wafers, 
Tested Ok and Ready to use,. 




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