Problem svgcoat2 SNF 2012-07-05 13:02:12: spinning never stop

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 5 13:34:54 PDT 2012


Previous wafer got removed from the track, system was waiting for next wafer to go Fromn the chill plate to the Coat Chuck  , Manually removed
 the dummy wafer , Initialized system , started same recipe (Clee58) 
was using , System back to normal, Ok to use. 




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