Problem svgcoat2 SNF 2012-07-24 12:56:56: Getting a resist streak on wafer
kcbalram at snf.stanford.edu
kcbalram at snf.stanford.edu
Tue Jul 24 12:56:56 PDT 2012
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Comment svgcoat2 SNF 2012-07-10 16:40:09: Vapor prime down
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Problem svgcoat2 SNF 2012-07-24 12:56:56: Getting a resist streak on wafer
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Used recipe 1.6 um VP with EBR
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Comment svgcoat2 SNF 2012-07-10 16:40:09: Vapor prime down
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Problem svgcoat2 SNF 2012-07-24 12:56:56: Getting a resist streak on wafer
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