Problem svgcoat2 SNF 2012-07-24 12:56:56: Getting a resist streak on wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jul 24 13:33:37 PDT 2012


Cleaned Dummy wafers and Cycled Wafers ( 8 Total ) Cleaned 
Dispense hose, Resist Bottle is full , No bubbles, Uniformity 
On all my wafers Sre Ok, Ready To use. 




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