From grahamab at snf.stanford.edu Tue Jun 12 22:52:51 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 12 Jun 2012 22:52:51 -0700 Subject: Comment svgcoat2 SNF 2012-06-12 22:52:51: bubble in track 2 3612 line Message-ID: causing alarm on every wafer From vilanova at snf.stanford.edu Wed Jun 13 10:16:00 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2012 10:16:00 -0700 Subject: Comment svgcoat2 SNF 2012-06-12 22:52:51: bubble in track 2 3612 line Message-ID: Purged Line and Ran Several Wafers Through ,Beeping Bubble Alarm Gone, We'll Keep an Eye On it in case it come Back, The Resist ( 3612) Bottle Is Full. From grahamab at snf.stanford.edu Thu Jun 21 17:08:49 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 21 Jun 2012 17:08:49 -0700 Subject: Problem svgcoat2 SNF 2012-06-21 17:08:49: 3612 dripping on wafers Message-ID: suckback on resist line 1 needs adjusted. resist is continuing to seep out leaving multiple drops on every wafer to go through. was running 1um 3612 backside EBR only From leixin at snf.stanford.edu Fri Jun 22 00:30:31 2012 From: leixin at snf.stanford.edu (leixin at snf.stanford.edu) Date: Fri, 22 Jun 2012 00:30:31 -0700 Subject: Problem svgcoat2 SNF 2012-06-22 00:30:30: Air in the resist transferring line, bad uniformity Message-ID: There was a lot of air in the 3612 resist line. Alarm of resist went on while the resist in the bottle were still plenty. After running around 10 wafers most of the air disappeared, but the uniformity of coating was still bad. From vilanova at snf.stanford.edu Fri Jun 22 08:52:22 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jun 2012 08:52:22 -0700 Subject: Problem svgcoat2 SNF 2012-06-21 17:08:49: 3612 dripping on wafers Message-ID: Purged Line Adjusted Suck back , Cleaned wafers ( 5 each ) Cycled the same recipe the Original User had Problems with All of my wafers Came out Good, No bubbles No alamrs and Uniformity Looks Good. Ok to use From vilanova at snf.stanford.edu Fri Jun 22 08:52:29 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jun 2012 08:52:29 -0700 Subject: Problem svgcoat2 SNF 2012-06-22 00:30:30: Air in the resist transferring line, bad uniformity Message-ID: Purged Line Adjusted Suck back , Cleaned wafers ( 5 each ) Cycled the same recipe the Original User had Problems with All of my wafers Came out Good, No bubbles No alamrs and Uniformity Looks Good. Ok to use From lindaw at snf.stanford.edu Wed Jun 27 13:31:37 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 27 Jun 2012 13:31:37 -0700 Subject: Problem svgcoat2 SNF 2012-06-27 13:31:36: hmds hotplate temp went unstable Message-ID: The primer hot plate went unstable, going from 109 to 134C in a matter of minutes, alarm sounded. WTF? It had been fine for 4 wafers prior to the temp variability. then it eventually went back to a stable state. From gsosa at snf.stanford.edu Wed Jun 27 15:03:02 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 Jun 2012 15:03:02 -0700 Subject: Problem svgcoat2 SNF 2012-06-27 13:31:36: hmds hotplate temp went unstable Message-ID: Checked and reset all connectors for TC and controller. Tested operation. All OK