Problem svgcoat2 SNF 2012-06-21 17:08:49: 3612 dripping on wafers

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Jun 21 17:08:49 PDT 2012


suckback on resist line 1 needs adjusted.  resist is continuing to seep out leaving multiple drops on every wafer to go through.  was running 1um 3612 backside EBR only




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