Problem svgcoat2 SNF 2012-06-22 00:30:30: Air in the resist transferring line, bad uniformity

leixin at leixin at
Fri Jun 22 00:30:31 PDT 2012

There was a lot of air in the 3612 resist line. Alarm of resist went on while the resist in the bottle were still plenty. After running around 10 wafers most of the air disappeared, but the uniformity of coating was still bad.

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