Problem svgcoat2 SNF 2012-06-21 17:08:49: 3612 dripping on wafers

vilanova at vilanova at
Fri Jun 22 08:52:22 PDT 2012

Purged Line Adjusted Suck back , Cleaned wafers ( 5 each ) 
Cycled the same recipe the Original User had Problems with
All of my wafers Came out Good, No bubbles No alamrs and Uniformity 
Looks Good. Ok to use 

More information about the svgcoat2-pcs mailing list