Problem svgcoat2 SNF 2012-06-22 00:30:30: Air in the resist transferring line, bad uniformity

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jun 22 08:52:29 PDT 2012


Purged Line Adjusted Suck back , Cleaned wafers ( 5 each ) 
Cycled the same recipe the Original User had Problems with
All of my wafers Came out Good, No bubbles No alamrs and Uniformity 
Looks Good. Ok to use 




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