Problem svgcoat2 SNF 2012-06-27 13:31:36: hmds hotplate temp went unstable

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Jun 27 13:31:37 PDT 2012


The primer hot plate went unstable, going from 109 to 134C in a matter of minutes, alarm sounded. WTF?  It had been fine for 4 wafers prior to the temp variability.  then it eventually went back to a stable state.




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