From carterlin at snf.stanford.edu Sat Mar 10 11:54:25 2012 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sat, 10 Mar 2012 11:54:25 -0800 Subject: Problem svgcoat2 SNF 2012-03-10 11:54:24: Vacuum Break Alarm Message-ID: Cannot run any processes. Wafers stay at sender. Vacuum Break Alarm sounds From cmcg at snf.stanford.edu Sun Mar 11 19:47:52 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 11 Mar 2012 19:47:52 -0700 Subject: Problem svgcoat2 SNF 2012-03-11 19:47:51: EBR dripping Message-ID: Seems to be low or something wrong with the pressure, causing it to drip and leave messy splotches on edge of wafers From cmcg at snf.stanford.edu Sun Mar 11 19:48:18 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 11 Mar 2012 19:48:18 -0700 Subject: Comment svgcoat2 SNF 2012-03-11 19:48:18: Vacuum Break Alarm stopped by powering off and on Message-ID: From vilanova at snf.stanford.edu Mon Mar 12 07:54:28 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Mar 2012 07:54:28 -0700 Subject: Problem svgcoat2 SNF 2012-03-10 11:54:24: Vacuum Break Alarm Message-ID: Vacuum Break Alarm Usually happens When One or more wafers Are misalign or someone Pick Up the cassette d the EBR canister and Both Canisters are fullm Cycled wafers and EBR Working Fine, It would be helpful if next time Users gives us the recipe that they were running at the time of the problem that way it would be easier to pinpoint the Problems. From vilanova at snf.stanford.edu Mon Mar 12 07:54:34 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Mar 2012 07:54:34 -0700 Subject: Problem svgcoat2 SNF 2012-03-11 19:47:51: EBR dripping Message-ID: Vacuum Break Alarm Usually happens When One or more wafers Are misalign or someone Pick Up the cassette d the EBR canister and Both Canisters are fullm Cycled wafers and EBR Working Fine, It would be helpful if next time Users gives us the recipe that they were running at the time of the problem that way it would be easier to pinpoint the Problems. From vilanova at snf.stanford.edu Mon Mar 12 07:54:42 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Mar 2012 07:54:42 -0700 Subject: Comment svgcoat2 SNF 2012-03-11 19:48:18: Vacuum Break Alarm stopped by powering off and on Message-ID: Vacuum Break Alarm Usually happens When One or more wafers Are misalign or someone Pick Up the cassette d the EBR canister and Both Canisters are fullm Cycled wafers and EBR Working Fine, It would be helpful if next time Users gives us the recipe that they were running at the time of the problem that way it would be easier to pinpoint the Problems. From jasmine at snf.stanford.edu Mon Mar 12 12:12:38 2012 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Mon, 12 Mar 2012 12:12:38 -0700 Subject: Comment svgcoat2 SNF 2012-03-12 12:12:37: Track 2 resist 3612 keeps beeping Message-ID: Track 2 resist keeps alarming even thought the bottle seems half full. From lindaw at snf.stanford.edu Tue Mar 13 15:15:41 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 13 Mar 2012 15:15:41 -0700 Subject: Comment svgcoat2 SNF 2012-03-13 15:15:40: resist bottle alarm chirping after dispense but Message-ID: the resist level alarm for track 2 3612 is chirping after every dispense, but the bottle appears to be over half full. From mahnaz at snf.stanford.edu Thu Mar 15 15:50:51 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Mar 2012 15:50:51 -0700 Subject: Problem svgcoat2 SNF 2012-03-15 15:50:50: 3617m non uniform/EBR Message-ID: back splash...needs help From vilanova at snf.stanford.edu Fri Mar 16 07:03:30 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Mar 2012 07:03:30 -0700 Subject: Comment svgcoat2 SNF 2012-03-13 15:15:40: resist bottle alarm chirping after dispense but Message-ID: MOved the sensor to a different position and Cycled wafers , is not beeping anymore. From vilanova at snf.stanford.edu Fri Mar 16 07:04:13 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Mar 2012 07:04:13 -0700 Subject: Comment svgcoat2 SNF 2012-03-12 12:12:37: Track 2 resist 3612 keeps beeping Message-ID: MOved Sensor Resist bottle to a different position, NO more beeping. From mahnaz at snf.stanford.edu Fri Mar 16 11:48:24 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 16 Mar 2012 11:48:24 -0700 Subject: Comment svgcoat2 SNF 2012-03-16 11:48:23: 3617m uniformity good Message-ID: slight ebr residue around the edges. From gsosa at snf.stanford.edu Wed Mar 21 07:55:59 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:55:59 -0700 Subject: Problem svgcoat2 SNF 2012-03-15 15:50:50: 3617m non uniform/EBR Message-ID: Updated nozzle center position for better dispense. Updated arm progam to eliminate EBR splashback. From gsosa at snf.stanford.edu Wed Mar 21 07:56:05 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:56:05 -0700 Subject: Comment svgcoat2 SNF 2012-03-16 11:48:23: 3617m uniformity good Message-ID: Updated nozzle center position for better dispense. Updated arm progam to eliminate EBR splashback.