Problem svgcoat2 SNF 2012-03-10 11:54:24: Vacuum Break Alarm

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 12 07:54:28 PDT 2012


Vacuum Break Alarm Usually happens When One or more wafers Are misalign or someone Pick Up the cassette d the EBR canister and
Both Canisters are fullm Cycled wafers and EBR  Working Fine, It would be helpful if next time Users gives us the recipe that they were running
at the time of the problem that way it would be easier to pinpoint the
Problems. 




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