From lindaw at snf.stanford.edu Wed May 9 12:13:26 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 9 May 2012 12:13:26 -0700 Subject: Problem svgcoat2 SNF 2012-05-09 12:13:26: sender cassette stops and alarms every wafer Message-ID: The sender cassette transfer stops itself and then alarms for every wafer but the first loaded. running vapor prime only. From gsosa at snf.stanford.edu Wed May 9 14:41:08 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 9 May 2012 14:41:08 -0700 Subject: Problem svgcoat2 SNF 2012-05-09 12:13:26: sender cassette stops and alarms every wafer Message-ID: Checked and adjusted cassette sensor. cycled 50+ wafers. Looks good. From kokab at snf.stanford.edu Sun May 13 16:39:57 2012 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sun, 13 May 2012 16:39:57 -0700 Subject: Problem svgcoat2 SNF 2012-05-13 16:39:57: the input carrier can't go down Message-ID: From vilanova at snf.stanford.edu Mon May 14 07:23:04 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 May 2012 07:23:04 -0700 Subject: Problem svgcoat2 SNF 2012-05-13 16:39:57: the input carrier can't go down Message-ID: Inspected track and Found the small carboy Full Of resist ,Emptied carboy and cycled all the dummy wafers track working fine, Ok to use From grahamab at snf.stanford.edu Mon May 21 13:06:04 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 21 May 2012 13:06:04 -0700 Subject: Problem svgcoat2 SNF 2012-05-21 13:06:03: vapor prime temp and vacuum issues Message-ID: received numerous vapor prime hotplate temperature alarms. initial alarm was for temp too low (~110C) and then subsequent wafers were alarming for higher temperatures (high 130's). temp was then okay for a few wafers before the temp dropped back down and it all started over. didn't perform a track rest since I had many wafers and coating was okay. track also strarted alarming for a vacuum break. not sure where this one was coming from. clearing it each time seemed to work okay. From vilanova at snf.stanford.edu Mon May 21 14:08:30 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 21 May 2012 14:08:30 -0700 Subject: Problem svgcoat2 SNF 2012-05-21 13:06:03: vapor prime temp and vacuum issues Message-ID: Initialized the system , Cleaned Up The Dummy wafers and cycled them Through HMDS Vapor Prime station Twice , Temperature Was Normal at 125oC, We'll Keep an Eye On it Just In case The Error Come Back.