Problem svgcoat2 SNF 2012-05-13 16:39:57: the input carrier can't go down
kokab at snf.stanford.edu
kokab at snf.stanford.edu
Sun May 13 16:39:57 PDT 2012
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Problem svgcoat2 SNF 2012-05-09 12:13:26: sender cassette stops and alarms every wafer
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Problem svgcoat2 SNF 2012-05-13 16:39:57: the input carrier can't go down
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Problem svgcoat2 SNF 2012-05-09 12:13:26: sender cassette stops and alarms every wafer
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Problem svgcoat2 SNF 2012-05-13 16:39:57: the input carrier can't go down
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