Problem svgcoat2 SNF 2012-05-21 13:06:03: vapor prime temp and vacuum issues

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon May 21 13:06:04 PDT 2012


received numerous vapor prime hotplate temperature alarms.  initial alarm was for temp too low (~110C) and then subsequent wafers were alarming for higher temperatures (high 130's).  temp was then okay for a few wafers before the temp dropped back down and it all started over.  
didn't perform a track rest since I had many wafers and coating was okay.  
track also strarted alarming for a vacuum break.  not sure where this one was coming from.  clearing it each time seemed to work okay.  




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