Problem svgcoat2 SNF 2012-05-21 13:06:03: vapor prime temp and vacuum issues

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon May 21 14:08:30 PDT 2012


Initialized the system ,
Cleaned Up The Dummy wafers and cycled them Through HMDS
Vapor Prime station Twice , Temperature Was Normal at 125oC,
We'll Keep an Eye On it Just In case The Error Come Back. 




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