[svgcoat2-pcs] Problem svgcoat2 SNF 2013-04-11 17:51:44: 1.6 um no EBR recipes don't work

fpurkl at snf.stanford.edu fpurkl at snf.stanford.edu
Thu Apr 11 17:51:45 PDT 2013


For the two 3612 recipes '1.6 um w/ VP no top EBR' and  '1.6 um w/o VP no top EBR' wafers from the sender cassette are not picked up. It looks like the cassette is being lifted up when the conveyer belt moves up against the wafer.The belt is not running. I tried  multiple wafers.


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