[svgcoat2-pcs] Problem svgcoat2 SNF 2013-04-11 17:51:44: 1.6 um no EBR recipes don't work

vilanova at stanford.edu vilanova at stanford.edu
Fri Apr 12 07:25:38 PDT 2013


Checked Both Recipes and everything is FIne,
THE PROBLEM WAS THAT THE SMALL CARBOY UNDER THE COAT TRACK #2 WAS ALMOST FULL WHEN THAT HAPPENS THE SYSTEM WONT LET WAFERS GO THROUGH UNTIL SOMEONE EMPTY IT,
I Empty the carboy and cycled wafers, tested all operations ok,
Ready tp use. 


More information about the svgcoat2-pcs mailing list