[svgcoat2-pcs] Comment svgcoat2 SNF 2013-04-17 13:24:26: please clean the hmds chamber

vilanova at stanford.edu vilanova at stanford.edu
Thu Apr 18 07:29:56 PDT 2013


Sorry But The HMDS Hotplate Looks Clean to me, I checked the entire
area for wafer pieces or Resist residues and I couldnt See anything
There's a few scratches On the plate but we cant remove those. 


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