[svgcoat2-pcs] Problem svgcoat2 SNF 2013-04-19 12:24:51: wafer broken on chuck 2

vilanova at stanford.edu vilanova at stanford.edu
Fri Apr 19 12:35:00 PDT 2013


Removed Broken wafer pieces from catch cup and Cleaned up 
leftover particles from belts and chill plate, cycled wafers, all operations
ok , good to use. 


More information about the svgcoat2-pcs mailing list