[svgcoat2-pcs] Problem svgcoat2 SNF 2013-04-19 12:16:48: wafer broken on chuck

vilanova at stanford.edu vilanova at stanford.edu
Fri Apr 19 12:35:59 PDT 2013


Removed  broken wafer pieces from catch cup area and cleaned up 
belts chill plate catch cup, cycled wafers , all operations ok
good to use. 


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